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18 Facts You Never Know About Electron Beam Lithography System
On April 2, 2021 by Anne WilliamsElectron-beam lithography (abbreviated as e-beam lithography, EBL) is defined as the process of scanning a focused beam of electrons to display custom shapes on a surface having a covering of an electron-sensitive film called a resist. EBL is known for its special technique for the creation of extremely small fine patterns (can’t be seen from